Gas Sensor

  • 气体传感器1(1).jpg
  • 气体传感器2(1).jpg

Gas Sensor

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Detailed Introduction


The TED110 is metallic oxide semi-conductor type MEMS gas sensor for monitoring indoor air quality. It is the smallest ultra-low power multi-gas sensor with high sensitivity and containing ASIC. Its design containing pre-installed software and the specific algorithms enable to detect multi-gas and measure the temperature. This sensor is consisted of nano-particle metal oxide sensing layer, micro heater, micro thickness membrane and Read-out IC: these components, together, provide high sensitivity, low-power consumption, fast response, small size and long-term stability. 
TED110 is a multi-gas sensor for monitoring Carbon monoxide(CO), combustible gases and a volatile organic compounds(VOCs). Additionally, it can be used as an equivalent carbon dioxide(eCO2) sensor. 



  • 1um thickness low stress Si3N4 Membrane wafer
  • High Sensitivity Thin film Sensing layer (ΔR/R0=20000% at 20ppm NO2)
  • Various gas (VOCs, CO, EtOH, CH4, NO2, Toluene, H2S etc) detect
  • Small Die Size (0.6*0.6*0.3 mm) and Small SMP packaging (3 x 3 x 1 mm) with ROIC
  • Self-Temperature compensation with ASIC / Module
  • Long-term stability
  • Fast Response time(<10sec) / Recovery time(<50sec)
  • Reasonable price
  • Low(15mW) power consumption
  • Various Sensor packaging: Metal(TO 45), SMP packaging
  • Output: I2C Digital Output


Target Gas VOCs, CO, EtOH, CH4, NO2, Toluene, H2S etc.

Rair / Rgas, 20 ppm

CO : 250 %, EtOH : 550 %, CH4 : 200 %,NO2 : 1100 %, Toluene : 550 %

Resolution 50 ppb of NO2
Response Time 10 sec
Operating Temp. -10 ~ 70°C
Storage Temp. -40 ~ 100°C
Related Humidity 10 ~ 90 %RH
Heater Voltage 1.0V
Electric Power Consumption < 15mW
Dimension 0.6 x 0.6 x 0.3 mm
SMP Packaging 3 x 3 x 1 mm
Output I2C Digital Output
Supply Voltage 3.3 V

* NOTICE : The contents of this manual are subject to change without prior notice.


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